화학공학소재연구정보센터

Thin Solid Films

Thin Solid Films, Vol.345, No.1 Entire volume, number list
ISSN: 0040-6090 (Print) 

In this Issue (38 articles)

1 - 6 Transport of vacuum arc plasma through an off-plane double bend filtering duct
Shi X, Tay BK, Tan HS, Liu E, Shi J, Cheah LK, Jin X
7 - 11 The high-density microwave plasma for high rate deposition of microcrystalline silicon
Shirai H, Sakuma Y, Ueyama H
12 - 17 Low temperature epitaxial growth of ZnO layer by plasma-assisted epitaxy
Yamauchi S, Handa H, Nagayama A, Hariu T
18 - 22 Structural and bonding properties of carbon nitride films prepared by dc magnetron sputtering
Jin YS, Shibata T, Matsuda Y, Fujiyama H
23 - 28 Effects of the power of electron shower and substrate bias on the synthesis of cementite films
Li SJ, Yumoto H, Shimotomai M, Ishihara M
29 - 33 Deposition process of metal oxide thin films by means of plasma CVD with beta-diketonates as precursors
Itoh K, Matsumoto O
34 - 37 Molecular dynamics study of cluster deposition in thermal plasma flash evaporation
Yamaguchi N, Sasajima Y, Terashima K, Yoshida T
38 - 41 Application of ITO films to photocatalysis
Yumoto H, Inoue T, Li SJ, Sako T, Nishiyama K
42 - 44 SiC film deposition by DC magnetron sputtering
Gou L, Qi CS, Ran JG, Zheng CQ
45 - 49 Formation and characterization of the fluorocarbonated-SiO2 films by O-2/FTES-helicon plasma chemical vapor deposition
Oh KS, Kang MS, Lee KM, Kim DS, Choi CK, Yun SM, Chang HY, Kim KH
50 - 54 Role of adsorbed species on the deposit in the diamond deposition with brominated benzenes as carbon source
Itoh K, Ohmachi S, Aida H, Matsumoto O
55 - 59 Diluent gas effect on diamond CVD growth
Mitsuda Y, Kobayashi K
60 - 66 Structural characterization of diamond thin films prepared by plasma jet
Park DW, Yun JS
67 - 70 Preparation of DLC gradient biomaterials by means of plasma source ion implant-ion beam enhanced deposition
Yin GF, Luo JM, Zheng CQ, Tong HH, Huo YF, Mu LL
71 - 74 Photoinduced electro-motive-force of sulfur doped plasma CVD methane film
Matsushita M, Bin Harun MZ, Morita S
75 - 79 Gas-phase diagnosis and high-rate growth of stable a-Si : H
Takagi T, Hayashi R, Ganguly G, Kondo M, Matsuda A
80 - 84 Particle formation and a-Si : H film deposition in narrow-gap RF plasma CVD
Maemura Y, Fujiyama H, Takagi T, Hayashi R, Futako W, Kondo M, Matsuda A
85 - 89 Plasma-induced free radicals of polycrystalline carbohydrates as spin probe for plasma diagnosis of plasma treatment
Kuzuya M, Ito K, Kondo S, Yamauchi Y
90 - 93 In situ observation of behavior of organosilicon molecules in low-temperature plasma enhanced CVD
Inoue Y, Sugimura H, Takai O
94 - 98 Temperature measurement of polymer substrates during plasma irradiation
Yamamoto K, Harada T, Tomikawa N, Uyama H, Yang SC, Fujiyama H
99 - 103 Plasma polymerization of cobalt tetraphenylporphyrin and the functionalities of the thin films produced
Nakamura K, Watanabe M, Zhou M, Fujishima M, Tsuchiya M, Handa T, Ishii S, Noguchi H, Kashiwagi K, Yoshida Y
104 - 107 Computer controlled plasma source ion nitriding
Deng XL, Wang YP, Xu ZF, Wang DZ, Lu WQ, Zhang JL, Yang FB, Yan JY, Ma TC
108 - 112 Plasma-nitrided AISI-316 stainless steel examined by scanning electron microscopy and secondary ion mass spectrometry
Baldwin MJ, Kumar S, Priest JM, Fewell MP, Prince KE, Short KT
113 - 118 Low pressure r.f. nitriding of austenitic stainless steel in an industrial-style heat-treatment furnace
Priest JM, Baldwin MJ, Fewell MP, Haydon SC, Collins GA, Short KT, Tendys J
119 - 123 Surface treatment of steel using non-equilibrium plasma at atmospheric pressure
Kiyokawa K, Itou A, Matsuoka H, Tomimatsu M, Sugiyama K
124 - 129 Characteristics of self bias voltage and poly-Si etching in pulsed helicon wave plasma
Kim JH, Kang CJ, Ahn TH, Moon JT
130 - 133 Parameters measurement of ECR C4F8/Ar plasma
Shindo M, Hiejima S, Ueda Y, Kawakami S, Ishii N, Kawai Y
134 - 139 Diagnoses of inductively coupled SF6 and N-2 plasmas at atmospheric pressure
Paul KC, Hatazawa S, Takahashi M, Cliteur GJ, Sakuta T
140 - 145 Heat and momentum transfer between a thermal plasma and suspended particles for different Knudsen numbers
Xi C
146 - 150 Scanning tunneling microscopy operating under a plasma environment
Terashima K, Taniguchi Y, Yamaguchi N, Takamura Y, Yoshida T
151 - 155 Time resolved spectrum of the fuse arc plasma
Saqib MA, Stokes AD
156 - 160 Compositional modification of boron carbide induced by induction plasma treatment
Tanaka T, Fan XB, Ishigaki T, Soucy G
161 - 166 Reduction and separation of silica-alumina mixture with argon-hydrogen thermal plasmas
Watanabe T, Soyama M, Kanzawa A, Takeuchi A, Koike M
167 - 171 Two-dimensional spatial distributions of sputtered particles produced in a planar magnetron discharge of indium-tin-oxide target
Matsuda Y, Muta M, Fujiyama H
172 - 177 Electronic properties of MOS capacitor exposed to Inductively coupled hydrogen plasma
Ikeda A, Sadou T, Nagashima H, Kouno K, Yoshikawa N, Tshukamoto K, Kuroki Y
178 - 181 Recent results of multi-cathode electron beam plasma source
Kim TY, Noh SJ, Jing JK, Lee KO, Chung KH
182 - 184 An analytic model for energy distributions of neutrals striking a planar cathode at low pressure glow discharges
Wang DZ, Deng XL, Ma TC
VII - VII Papers presented at the joint symposium: The 11th Symposium on Plasma Science for Materials and the 4th Asia-Pacific Conference on Plasma Science & Technology, Coogee, Sydney, NSW, Australia, 27-29 July 1998 - Preface
Yoshida T, Boswell RW, Koinuma H, Lowke J