검색결과 : 1건
No. | Article |
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1 |
Direct observation of electrically harmful surface defects of Si wafer immersed in slightly Cu-contaminated water Kobayashi T, Uchiyama I, Kimura A, Oka S, Kitagawara Y Journal of Crystal Growth, 210(1-3), 112, 2000 |
No. | Article |
---|---|
1 |
Direct observation of electrically harmful surface defects of Si wafer immersed in slightly Cu-contaminated water Kobayashi T, Uchiyama I, Kimura A, Oka S, Kitagawara Y Journal of Crystal Growth, 210(1-3), 112, 2000 |