화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Structural defects in SiO2/SiC interface probed by a slow positron beam
Maekawa M, Kawasuso A, Chen ZQ, Yoshikawa M, Suzuki R, Ohdaira T
Applied Surface Science, 244(1-4), 322, 2005
2 Photoemission spectroscopic studies on oxide/SiC interfaces formed by dry and pyrogenic oxidation
Hijikata Y, Yaguchi H, Ishida Y, Yoshikawa M, Kamiya T, Yoshida S
Materials Science Forum, 457-460, 1341, 2004
3 Fabrication of double implanted (0001) 4H-SiC MOSFETs by using pyrogenic re-oxidation annealing
Kosugi R, Kiritani N, Suzuki K, Yatsuo T, Adachi K, Fukuda K
Materials Science Forum, 457-460, 1397, 2004
4 Effects of steam annealing on electrical characteristics of 3C-SiC metal-oxide-semiconductor structures
Yoshikawa M, Kojima K, Ohshima T, Itoh H, Okada S, Ishida Y
Materials Science Forum, 338-3, 1129, 2000