검색결과 : 13건
| No. | Article |
|---|---|
| 1 |
Growth mechanisms for Si epitaxy on O atomic layers: Impact of O-content and surface structure Jayachandran S, Billen A, Douhard B, Conard T, Meersschaut J, Moussa A, Caymax M, Bender H, Vandervorst W, Heyns M, Delabie A Applied Surface Science, 384, 152, 2016 |
| 2 |
Sensitivity of the crystal quality of SiGe layers grown at low temperatures by trisilane and germane Abedin A, Moeen M, Cappetta C, Ostling M, Radamson HH Thin Solid Films, 613, 38, 2016 |
| 3 |
Low temperature Si:C co-flow and hybrid process using Si3H8/Cl-2 Bauer M, Thomas SG Thin Solid Films, 520(8), 3133, 2012 |
| 4 |
Gas phase particle formation and elimination on Si (100) in low temperature reduced pressure chemical vapor deposition silicon-based epitaxial layers Shinriki M, Chung K, Hasaka S, Brabant P, He H, Adam TN, Sadana D Thin Solid Films, 520(8), 3190, 2012 |
| 5 |
Thin crystalline silicon solar cells based on epitaxial films grown at 165 degrees C by RF-PECVD Cariou R, Labrune M, Cabarrocas PRI Solar Energy Materials and Solar Cells, 95(8), 2260, 2011 |
| 6 |
Structural and electrical properties of epitaxial Si layers prepared by E-beam evaporation Dogan P, Rudigier E, Fenske F, Lee KY, Gorka B, Rau B, Conrad E, Gall S Thin Solid Films, 516(20), 6989, 2008 |
| 7 |
GaN materials growth by MOVPE in a new-design reactor using DMHy and NH3 Gautier S, Sartel C, Ould-Saad S, Martin J, Sirenko A, Ougazzaden A Journal of Crystal Growth, 298, 428, 2007 |
| 8 |
Large-grained polycrystalline silicon films on glass by argon-assisted ECRCVD epitaxial thickening of seed layers Ekanayake G, Quinn T, Reehal HS, Rau B, Gall S Journal of Crystal Growth, 299(2), 309, 2007 |
| 9 |
Low-temperature epitaxy of silicon by electron beam evaporation Gorka B, Dogan P, Sieber I, Fenske F, Gall S Thin Solid Films, 515(19), 7643, 2007 |
| 10 |
Extended defects in Si films epitaxially grown by low-temperature ECRCVD Rau B, Petter K, Sieber I, Stoger-Pollach M, Eyidi D, Schattschneider P, Gall S, Lips K, Fuhs W Journal of Crystal Growth, 287(2), 433, 2006 |