화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Fabrication and characterization of strained Si1-yCy n-MOSFETs grown by Hot Wire Cell method
Ishihara H, Watahiki T, Yamada A, Konagai M
Thin Solid Films, 508(1-2), 329, 2006
2 Highly conductive microcrystalline silicon carbide films deposited by the hot wire cell method and its application to amorphous silicon solar cells
Miyajima S, Yamada A, Konagai M
Thin Solid Films, 430(1-2), 274, 2003
3 Epitaxial growth of strained Si1-yCy films by the hot-wire cell method and its application to metal oxide semiconductor devices
Watahiki T, Abe K, Yamada A, Konagai M
Thin Solid Films, 430(1-2), 283, 2003
4 Low temperature epitaxial growth of Si and Si1-yCy films by hot wire cell method
Watahiki T, Abe K, Tamura H, Miyajima S, Yamada A, Konagai M
Thin Solid Films, 395(1-2), 221, 2001
5 New approach to low-temperature Si epitaxy by using hot wire cell method
Watahiki T, Yamada A, Konagai M
Journal of Crystal Growth, 209(2-3), 335, 2000