검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Development of a compact nitrogen radical source by helicon-wave discharge employing a permanent magnet Sasaki K, Kokubu H, Hayashi D, Kadota K Thin Solid Films, 386(2), 243, 2001 |
| No. | Article |
|---|---|
| 1 |
Development of a compact nitrogen radical source by helicon-wave discharge employing a permanent magnet Sasaki K, Kokubu H, Hayashi D, Kadota K Thin Solid Films, 386(2), 243, 2001 |