화학공학소재연구정보센터
검색결과 : 8건
No. Article
1 Proton conductivity at medium temperature range and chemical durability of phosphosilicate gels added with a third component
Matsuda A, Nono Y, Tadanaga K, Minami T, Tatsumisago M
Solid State Ionics, 162, 253, 2003
2 Development of self-aligned contact technology for 0.18 mu m static random access memory devices
Qiao JM, Jin B, Phatak P, Yu JY, Geha S
Journal of Vacuum Science & Technology B, 17(5), 2373, 1999
3 Quantitative determination of dielectric thin-film properties on product wafers using infrared reflection-absorption spectroscopy
Niemczyk TM, Zhang LZ, Haaland DM, Radigan KJ
Journal of Vacuum Science & Technology A, 16(6), 3490, 1998
4 A Vibrational Study of Ethanol Adsorption on Si(100)
Eng J, Raghavachari K, Struck LM, Chabal YJ, Bent BE, Flynn GW, Christman SB, Chaban EE, Williams GP, Radermacher K, Manti S
Journal of Chemical Physics, 106(23), 9889, 1997
5 A Comparative-Study of Spin-on and Chemical-Vapor-Deposited Teflon Amorphous Fluoropolymer Thin-Films
Sharangpani R, Singh R
Journal of the Electrochemical Society, 144(8), 2924, 1997
6 Infrared-Absorption Spectroscopy for Monitoring Condensable Gases in Chemical-Vapor-Deposition Applications
Oneill JA, Passow ML, Cotler TJ
Journal of Vacuum Science & Technology A, 12(3), 839, 1994
7 Comparison of Boranol and Silanol Reactivities in Boron-Doped SiO2 Chemical-Vapor-Deposition from Trimethyl Borate and Tetraethyl Orthosilicate
Bartram ME, Moffat HK
Journal of Vacuum Science & Technology A, 12(4), 1027, 1994
8 Chemical-Vapor-Deposition of TiSi2 Using SiH4 and TiCl4
Mendicino MA, Southwell RP, Seebauer EG
Thin Solid Films, 253(1-2), 473, 1994