검색결과 : 1건
No. | Article |
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1 |
Further studies of N doped a-SiC : H films deposited by PECVD and annealed by pulse electron beam Huran J, Hotovy I, Kobzev AP, Balalykin NI Thin Solid Films, 459(1-2), 149, 2004 |
No. | Article |
---|---|
1 |
Further studies of N doped a-SiC : H films deposited by PECVD and annealed by pulse electron beam Huran J, Hotovy I, Kobzev AP, Balalykin NI Thin Solid Films, 459(1-2), 149, 2004 |