검색결과 : 3건
No. | Article |
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1 |
Characterization of lanthanum lutetium oxide thin films grown by atomic layer deposition as an alternative gate dielectric Roeckerath M, Heeg T, Lopes JMJ, Schubert J, Mantl S, Besmehn A, Myllymaki P, Niinisto L Thin Solid Films, 517(1), 201, 2008 |
2 |
Preparation and characterization of rare earth scandates as alternative gate oxide materials Wagner M, Heeg T, Schubert J, Zhao C, Richard O, Caymax M, Afanas'ev VV, Mantl S Solid-State Electronics, 50(1), 58, 2006 |
3 |
Mist deposited high-k dielectrics for next generation MOS gates Lee DO, Roman P, Wu CT, Mumbauer P, Brubaker M, Grant R, Ruzyllo J Solid-State Electronics, 46(11), 1671, 2002 |