검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Reflectance Modeling for in-Situ Dry Etch Monitoring of Bulk SiO2 and III-V Multilayer Structures Hicks SE, Parkes W, Wilkinson JA, Wilkinson CD Journal of Vacuum Science & Technology B, 12(6), 3306, 1994 |
| No. | Article |
|---|---|
| 1 |
Reflectance Modeling for in-Situ Dry Etch Monitoring of Bulk SiO2 and III-V Multilayer Structures Hicks SE, Parkes W, Wilkinson JA, Wilkinson CD Journal of Vacuum Science & Technology B, 12(6), 3306, 1994 |