검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Characterization of a PECVD WxN process using N-2, H-2, and WF6 Lai KK, Mak AW, Wendling TPHF, Jian P, Hathcock B Thin Solid Films, 332(1-2), 329, 1998 |
| No. | Article |
|---|---|
| 1 |
Characterization of a PECVD WxN process using N-2, H-2, and WF6 Lai KK, Mak AW, Wendling TPHF, Jian P, Hathcock B Thin Solid Films, 332(1-2), 329, 1998 |