검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
RF-plasma enhanced CVD of TiSi2 thin films: effects of TiCl4 flow rate and RF power Fouad OA, Uddin NMD, Yamazato M, Nagano M Journal of Crystal Growth, 257(1-2), 153, 2003 |
| No. | Article |
|---|---|
| 1 |
RF-plasma enhanced CVD of TiSi2 thin films: effects of TiCl4 flow rate and RF power Fouad OA, Uddin NMD, Yamazato M, Nagano M Journal of Crystal Growth, 257(1-2), 153, 2003 |