화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Low-Pressure Deposition of Tin Thin-Films from a Tetrakis(Dimethylamido)Titanium Precursor
Truong CM, Chen PJ, Corneille JS, Oh WS, Goodman DW
Journal of Physical Chemistry, 99(21), 8831, 1995
2 Surface Spectroscopic Studies of the Deposition of Tin Thin-Films from Tetrakis-(Dimethylamido)-Titanium and Ammonia
Corneille JS, Chen PJ, Truong CM, Oh WS, Goodman DW
Journal of Vacuum Science & Technology A, 13(3), 1116, 1995