Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 1116-1120, 1995 DOI10.1116/1.579596 Export Citation Surface Spectroscopic Studies of the Deposition of Tin Thin-Films from Tetrakis-(Dimethylamido)-Titanium and Ammonia Corneille JS, Chen PJ, Truong CM, Oh WS, Goodman DW Keywords:GROWTH [Referenced By] Please enable JavaScript to view the comments powered by Disqus.