검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Chemical mechanical polishing of polyarylether low dielectric constant layers by manganese oxide slurry Hara T, Tomisawa T, Kurosu T, Doy TK Journal of the Electrochemical Society, 146(6), 2333, 1999 |
| No. | Article |
|---|---|
| 1 |
Chemical mechanical polishing of polyarylether low dielectric constant layers by manganese oxide slurry Hara T, Tomisawa T, Kurosu T, Doy TK Journal of the Electrochemical Society, 146(6), 2333, 1999 |