검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Quantitative two-dimensional profiling of 0.35 mu m transistors with lightly doped drain structures McDonald A, Mahaffy R, Wang XD, Kuklewicz C, Shih CK, Dennis M, Tiffin D, Kadoch D, Duane M Journal of Vacuum Science & Technology B, 18(1), 572, 2000 |
| 2 |
2-Dimensional Dopant Profiling of Very Large-Scale Integrated Devices Using Selective Etching and Atomic-Force Microscopy Barrett M, Dennis M, Tiffin D, Li Y, Shih CK Journal of Vacuum Science & Technology B, 14(1), 447, 1996 |