검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Dry etching of amorphous-Si gates for deep sub-100 nm silicon-on-insulator complementary metal-oxide semiconductor Yost D, Forte T, Fritze M, Astolfi D, Suntharalingam V, Chen CK, Cann S Journal of Vacuum Science & Technology B, 20(1), 191, 2002 |
| 2 |
Sub-100 nm KrF lithography for complementary metal-oxide-semiconductor circuits Fritze M, Astolfi D, Liu H, Chen CK, Suntharalingam V, Preble D, Wyatt PW Journal of Vacuum Science & Technology B, 17(2), 345, 1999 |