화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Non-Rutherford backscattering studies of SiC/SIMOX structures
Chen KW, Yu YH, Lei YM, Cheng LL, Sundaraval B, Luo EZ, Wong SP, Wilson IH, Chen LZ, Ren CX, Zou SC
Applied Surface Science, 184(1-4), 178, 2001
2 Structural and optical properties of SiC films deposited on Si by DG magnetron sputtering
Lei YM, Yu YH, Cheng LL, Lin L, Sundaraval B, Luo EZ, Lin S, Ren CX, Cheung WY, Wong SP, Xu JB, Zou SC, Wilson IH
Materials Science Forum, 353-356, 191, 2001