검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Optical diagnostics of radio-frequency plasmas containing CHF3 and CHF3/O-2: Laser-induced fluorescence of CF2, CF, and O atoms, and optical emission from H, F, and O Hancock G, Sucksmith JP Journal of Vacuum Science & Technology A, 20(1), 270, 2002 |
| 2 |
Time-Resolved Fourier-Transform Infrared-Emission as a Plasma Diagnostic Hancock G, Sucksmith JP Journal of Vacuum Science & Technology A, 13(6), 2945, 1995 |