검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Modeling of a plasma etcher for charging free processing of nanoscale structures Radmilovic-Radjenovic M, Stojkovic A, Strinic A, Stojanovic V, Nikitovic Z, Malovic GN, Petrovic ZL Materials Science Forum, 518, 57, 2006 |
| 2 |
Data bases for modeling plasma devices for processing of integrated circuits Nikitovic Z, Sasic O, Petrovic ZL, Malovic G, Strinic A, Dujko S, Raspopovic Z, Radmilovic-Radjenovic M Materials Science Forum, 453-454, 15, 2004 |