검색결과 : 27건
| No. | Article |
|---|---|
| 1 |
Low temperature plasma etching for Si3N4 waveguide applications Celo D, Vandusen R, Smy T, Albert J, Tarr NG, Waldron PD Journal of Vacuum Science & Technology A, 26(2), 253, 2008 |
| 2 |
Ultrahigh-surface-area anatase thin films by direct oxidation of Ti film with hydrogen peroxide Froimovitch A, McGarry S, Smy T, Fraser J Electrochemical and Solid State Letters, 10(3), K11, 2007 |
| 3 |
Ultrahigh-Surface-Area anatase thin films by direct oxidation of Ti film with hydrogen peroxide (vol 10, pg K11, 2007) Froimovitch A, McGarry S, Smy T, Fraser J Electrochemical and Solid State Letters, 10(10), S5, 2007 |
| 4 |
Anisotropic microstructure of physical vapor deposited coatings caused by anisotropy in flux distribution of arriving atoms Grachev SY, Kamminga JD, Janssen GCAM, Smy T, Tichelaar FD Journal of Vacuum Science & Technology A, 25(4), 1184, 2007 |
| 5 |
Controlled growth of periodic pillars by glancing angle deposition Dick B, Brett MJ, Smy T Journal of Vacuum Science & Technology B, 21(1), 23, 2003 |
| 6 |
Investigation of substrate rotation at glancing-incidence on thin-film morphology Dick B, Brett MJ, Smy T Journal of Vacuum Science & Technology B, 21(6), 2569, 2003 |
| 7 |
Column angle variations in porous chevron thin films Harris KD, Vick D, Smy T, Brett MJ Journal of Vacuum Science & Technology A, 20(6), 2062, 2002 |
| 8 |
Modeling 3D effects of substrate topography on step coverage and film morphology of thin metal films Smy T, Dew SK, Joshi R Thin Solid Films, 415(1-2), 32, 2002 |
| 9 |
Efficient modeling of thin film deposition for low sticking using a three-dimensional microstructural simulator Smy T, Dew SK, Joshi RV Journal of Vacuum Science & Technology A, 19(1), 251, 2001 |
| 10 |
Periodic submicrometer structures by sputtering Dick B, Brett MJ, Smy T, Belov M, Freeman MR Journal of Vacuum Science & Technology B, 19(5), 1813, 2001 |