Nanostructured titania films are formed by directly oxidizing titanium with hydrogen peroxide. A low-temperature anneal transforms the films from an amorphous phase to anatase crystal. Surface-area measurements of the annealed nanostructured titania using the Brunauer, Emmett, and Teller method reveal a specific surface area of 535 m(2)/g, the highest ever reported for a nanostructured titania film. The low-temperature anneal is compatible with heat-treated polyimide or polyester substrates for roll-to-roll processing of flexible electronics or solar cells. (c) 2006 The Electrochemical Society.