검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Electrochemical measurements of passivation bilayers on copper in a CMP system Carter MK, Small R Journal of the Electrochemical Society, 151(10), B563, 2004 |
| 2 |
Dissolution of copper thin films in hydroxylamine-based solutions Huang W, Tamilmani S, Raghavan S, Small R International Journal of Mineral Processing, 72(1-4), 365, 2003 |
| 3 |
Effects of amine fluoride cleaning chemistry on metallic aluminum integrated circuit films - I. Experimental measurements and chemical Modeling Carter MK, Small R, Cernat M, Hansen B Journal of the Electrochemical Society, 150(2), B52, 2003 |
| 4 |
Potential-pH diagrams of interest to chemical mechanical planarization of copper Tamilmani S, Huang W, Raghavan S, Small R Journal of the Electrochemical Society, 149(12), G638, 2002 |
| 5 |
Effect of de-ionized water parameters rinse on postmetal etch residue removal using semiaqueous cleaning chemistries Small R, Kirk S, Cernat M Journal of Vacuum Science & Technology B, 20(2), 635, 2002 |