검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Fabrication of Sub-100 nm GaAs Columns by Reactive Ion Etching Using Au Islands as Etching Mask Ahopelto J, Airaksinen VM, Siren E, Niemi HE Journal of Vacuum Science & Technology B, 13(1), 161, 1995 |
| No. | Article |
|---|---|
| 1 |
Fabrication of Sub-100 nm GaAs Columns by Reactive Ion Etching Using Au Islands as Etching Mask Ahopelto J, Airaksinen VM, Siren E, Niemi HE Journal of Vacuum Science & Technology B, 13(1), 161, 1995 |