Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.13, No.1, 161-162, 1995 DOI10.1116/1.587976 Export Citation Fabrication of Sub-100 nm GaAs Columns by Reactive Ion Etching Using Au Islands as Etching Mask Ahopelto J, Airaksinen VM, Siren E, Niemi HE Please enable JavaScript to view the comments powered by Disqus.
