검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Hydrogen mediated transport of Sn to Ru film surface Faradzhev N, Sidorkin V Journal of Vacuum Science & Technology A, 27(2), 306, 2009 |
| 2 |
Sub-10-nm nanolithography with a scanning helium beam Sidorkin V, van Veldhoven E, van der Drift E, Alkemade P, Salemink H, Maas D Journal of Vacuum Science & Technology B, 27(4), L18, 2009 |
| 3 |
Influence of hydrogen silsesquioxane resist exposure temperature on ultrahigh resolution electron beam lithography Sidorkin V, van der Drift E, Salemink H Journal of Vacuum Science & Technology B, 26(6), 2049, 2008 |
| 4 |
electron-beam focusing in 1 : 1 electron projection lithography system Sidorkin V, Moon CW, El Mostafa B, Lee SW, Yoo IK Journal of Vacuum Science & Technology B, 24(1), 224, 2006 |