검색결과 : 1건
No. | Article |
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1 |
Effects of deposition and annealing conditions on the structure and electrical properties of LPCVD silicon thin films Das S, Shriram R, Bhat KN, Rao PRS Journal of Materials Science, 35(18), 4743, 2000 |
No. | Article |
---|---|
1 |
Effects of deposition and annealing conditions on the structure and electrical properties of LPCVD silicon thin films Das S, Shriram R, Bhat KN, Rao PRS Journal of Materials Science, 35(18), 4743, 2000 |