화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Characterization of electroplated copper films for three-dimensional advanced packaging
Seah CH, You GZ, Li CY, Kumar R
Journal of Vacuum Science & Technology B, 22(3), 1106, 2004
2 Enhancement of adhesion strength of Cu seed Bayer with different thickness in Cu/low-k multilevel interconnects
Wang G, Jong YW, Balakumar S, Seah CH, Hara T
Journal of Vacuum Science & Technology B, 22(5), 2384, 2004
3 Annealing of copper electrodeposits
Seah CH, Mridha S, Chan LH
Journal of Vacuum Science & Technology A, 17(4), 1963, 1999