검색결과 : 15건
| No. | Article |
|---|---|
| 1 |
Laser engraving optimization for achieving smooth sidewalls Sikora A, Coustillier G, Sarnet T, Sentis M Applied Surface Science, 492, 382, 2019 |
| 2 |
Characterization of organic photovoltaic devices using femtosecond laser induced breakdown spectroscopy Banerjee SP, Sarnet T, Siozos P, Loulakis M, Anglos D, Sentis M Applied Surface Science, 418, 542, 2017 |
| 3 |
Picosecond laser micromachining prior to FIB milling for electronic microscopy sample preparation Sikora A, Fares L, Adrian J, Goubier V, Delobbe A, Corbin A, Sentis M, Sarnet T Applied Surface Science, 418, 607, 2017 |
| 4 |
Structural, chemical and optical properties of cerium dioxide film prepared by atomic layer deposition on TiN and Si substrates Vangelista S, Piagge R, Ek S, Sarnet T, Ghidini G, Martella C, Lamperti A Thin Solid Films, 636, 78, 2017 |
| 5 |
Atomic Layer Deposition and Characterization of Bi2Te3 Thin Films Sarnet T, Hatanpaa T, Puukilainen E, Mattinen M, Vehkamaki M, Mizohata K, Ritala M, Leskela M Journal of Physical Chemistry A, 119(11), 2298, 2015 |
| 6 |
Atomic Layer Deposition and Characterization of GeTe Thin Films Sarnet T, Pore V, Hatanpaa T, Ritala M, Leskela M, Schrott A, Zhu Y, Raoux S, Cheng HY Journal of the Electrochemical Society, 158(12), D694, 2011 |
| 7 |
Laser activation of Ultra Shallow Junctions (USJ) doped by Plasma Immersion Ion Implantation (PIII) Vervisch V, Larmande Y, Delaporte P, Sarnet T, Sentis M, Etienne H, Torregrosa F, Cristiano F, Fazzini PF Applied Surface Science, 255(10), 5647, 2009 |
| 8 |
Realization of ultrashallow junctions by plasma immersion ion implantation and laser annealing Vervisch V, Etienne H, Torregrosa F, Roux L, Ottaviani L, Pasquinelli M, Sarnet T, Delaporte P Journal of Vacuum Science & Technology B, 26(1), 286, 2008 |
| 9 |
Micro and nano-structuration of silicon by femtosecond laser: Application to silicon photovoltaic cells fabrication Halbwax M, Sarnet T, Delaporte P, Sentis A, Etienne H, Torregrosa F, Vervisch V, Perichaud I, Martinuzzi S Thin Solid Films, 516(20), 6791, 2008 |
| 10 |
Micromachining of semiconductor by femtosecond laser for integrated circuit defect analysis Halbwax M, Sarnet T, Hermann J, Delaporte P, Sentis M, Fares L, Haller G Applied Surface Science, 254(4), 911, 2007 |