화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 The Crack Opening Method in Silicon-Wafer Bonding - How Useful Is It
Martini T, Steinkirchner J, Gosele U
Journal of the Electrochemical Society, 144(1), 354, 1997
2 SILICON-WAFER BONDING VIA DESIGNED MONOLAYERS
STEINKIRCHNER J, MARTINI T, REICHE M, KASTNER G, GOSELE U
Advanced Materials, 7(7), 662, 1995
3 A Simple Chemical Treatment for Preventing Thermal Bubbles in Silicon-Wafer Bonding
Tong QY, Kaido G, Tong L, Reiche M, Shi F, Steinkirchner J, Tan TY, Gosele U
Journal of the Electrochemical Society, 142(10), L201, 1995