검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Laser-induced thermal desorption analysis of the surface during Ge etching in a Cl-2 inductively coupled plasma Choe JY, Herman IP, Donnelly VM Journal of Vacuum Science & Technology A, 16(6), 3266, 1998 |
| 2 |
Silicon quantum integrated circuits - an attempt to fabricate silicon-based quantum devices using CMOS fabrication techniques Paul DJ, Coonan B, Redmond G, O'Neill BJ, Crean GM, Hollander B, Mantl S, Zozoulenko I, Berggren KF, Lazzari JL, d'Avitaya FA, Derrien J Thin Solid Films, 336(1-2), 130, 1998 |