화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 SiCOI structure fabricated by catalytic chemical vapor deposition
Yasui K, Miura H, Takata M, Akahane T
Thin Solid Films, 516(5), 644, 2008
2 AlGaN/GaNHEMT structures grown on SiCOI wafers obtained by the Smart CutTM technology.
Larheche H, Faure B, Richtarch C, Letertre F, Langer R, Bove P
Materials Science Forum, 457-460, 1621, 2004
3 Improved SiCOI structures elaborated by heteroepitaxy of 3C-SiC on SOI
Chassagne T, Ferro G, Wang H, Stoemenos Y, Peyre H, Contreras S, Camassel J, Monteil Y, Ghyselen B
Materials Science Forum, 389-3, 343, 2002
4 SiC power devices on QUASIC and SiCOI Smart-Cut (R) substrates: First demonstrations
Letertre F, Daval N, Templier F, Bano E, Planson D, Di Ciocco L, Jalaguier E, Bluet JM, Billon T, Madar R, Chante JP
Materials Science Forum, 433-4, 813, 2002