화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Data bases for modeling plasma devices for processing of integrated circuits
Nikitovic Z, Sasic O, Petrovic ZL, Malovic G, Strinic A, Dujko S, Raspopovic Z, Radmilovic-Radjenovic M
Materials Science Forum, 453-454, 15, 2004
2 Computer-Simulation of Added Li Influence on the ICP Properties
Holclajtnerantunovic I, Raspopovic Z, Georgijevic V, Tripkovic M
Plasma Chemistry and Plasma Processing, 17(3), 331, 1997