검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Plasma-Assisted Dry-Etching of Cobalt Silicide for Microelectronics Applications Fracassi F, Dagostino R, Lamendola R, Filippo A, Rapisarda C, Vasquez P Journal of the Electrochemical Society, 143(2), 701, 1996 |
| No. | Article |
|---|---|
| 1 |
Plasma-Assisted Dry-Etching of Cobalt Silicide for Microelectronics Applications Fracassi F, Dagostino R, Lamendola R, Filippo A, Rapisarda C, Vasquez P Journal of the Electrochemical Society, 143(2), 701, 1996 |