검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Boron nitride films synthesized by RF plasma CVD of borane-ammonia and nitrogen Deb B, Bhattacharjee B, Ganguli A, Chaudhuri S, Pal AK Materials Chemistry and Physics, 76(2), 130, 2002 |
| 2 |
Electron diffraction and high-resolution transmission microscopy studies of nanostructured Si thin films deposited by radiofrequency dusty plasmas Viera G, Huet S, Mikikian M, Boufendi L Thin Solid Films, 403-404, 467, 2002 |
| 3 |
Co-operation process of plasma CVD and sputtering, using methane, SF6 and Ar mixture gas, and gold plate discharge electrode Matsushita M, Kashem A, Morita S Thin Solid Films, 407(1-2), 50, 2002 |
| 4 |
Field emission from thin film diamond grown using a magnetically enhanced radio frequency plasma source Proffitt SS, Probert SJ, Whitfield MD, Foord JS, Jackman RB Journal of Vacuum Science & Technology B, 17(2), 719, 1999 |