화학공학소재연구정보센터
Thin Solid Films, Vol.407, No.1-2, 50-53, 2002
Co-operation process of plasma CVD and sputtering, using methane, SF6 and Ar mixture gas, and gold plate discharge electrode
Carbon-sulfur-gold (C-S-Au) composite thin films were formed by a co-operation process of plasma CVD and sputtering, using methane, SF, and Ar mixture gas, and gold plate on the discharge electrode. The content of Au atoms in the film was smaller than 2 at.%. The refractive indexes were measured to be 1.6, 2.4 and 3.7 for C, C-S (80:20 at.% ratio) and C-S-Au (81.1:18.8:0.1 at.% ratio), respectively. The electronic polarizabilities of C, S and Au are discussed, using the values of refractive index.