검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Resist materials for proton beam writing: A review van Kan JA, Malar P, Wang YH Applied Surface Science, 310, 100, 2014 |
| 2 |
Novel multi-alicyclic polymers for enhancing plasma etch resistance in 193 nm lithography Lee JH, Ahn KD, Cho I Polymer, 42(4), 1757, 2001 |
| 3 |
A review of ion projection lithography Melngailis J, Mondelli AA, Berry IL, Mohondro R Journal of Vacuum Science & Technology B, 16(3), 927, 1998 |
| 4 |
Novel Chemically Amplified Imaging Materials Containing Malonate Pendant Groups Havard JM, Frechet JM Polymer Bulletin, 37(4), 475, 1996 |