Polymer Bulletin, Vol.37, No.4, 475-482, 1996
Novel Chemically Amplified Imaging Materials Containing Malonate Pendant Groups
A new chemically amplified polymeric imaging system based on polymers containing t-butylmalonate pendant groups has been demonstrated. Both the homopolymer of di-t-butyl (vinylbenzyl)benzylmalonate and its copolymer with styrene have been tested in coatings containing a photoacid generator. Imaging experiments confirm that the materials have very high sensitivities when exposed to UV radiation near 250nm.