검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Plasma-surface interactions for advanced plasma etching processes in nanoscale ULSI device fabrication: A numerical and experimental study Ono K, Ohta H, Eriguchi K Thin Solid Films, 518(13), 3461, 2010 |
| 2 |
Profile simulation of high aspect ratio contact etch Kim D, Hudson EA, Cooperberg D, Edelberg E, Srinivasan M Thin Solid Films, 515(12), 4874, 2007 |
| 3 |
A model for the prediction of supersaturation level in batch cooling crystallization Yang GY, Louhi-Kultanen M, Sha ZL, Kubota N, Kallas J Journal of Chemical Engineering of Japan, 39(4), 426, 2006 |
| 4 |
New three dimensional simulator for low energy (similar to 1 keV) electron beam systems Lee Y, Lee W, Chun K, Kim H Journal of Vacuum Science & Technology B, 17(6), 2903, 1999 |
| 5 |
Simplified Simulation of Step Coverage in Chemical-Vapor-Deposition with a Hemispherical Vapor Source Model Yun JH, Rhee SW Journal of the Electrochemical Society, 144(5), 1803, 1997 |