검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Dependence of Nanotopography Impact on Fumed Silica and Ceria Slurry Added with Surfactant for Shallow Trench Isolation Chemical Mechanical Polishing Cho KC, Jeon H, Park JG Korean Journal of Materials Research, 16(5), 308, 2006 |