검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Sub-100 nm silicon on insulator complimentary metal-oxide semiconductor transistors by deep ultraviolet optical lithography Fritze M, Burns J, Wyatt PW, Chen CK, Gouker P, Chen CL, Keast C, Astolfi D, Yost D, Preble D, Curtis A, Davis P, Cann S, Deneault S, Liu HY Journal of Vacuum Science & Technology B, 18(6), 2886, 2000 |
| 2 |
Sub-100 nm KrF lithography for complementary metal-oxide-semiconductor circuits Fritze M, Astolfi D, Liu H, Chen CK, Suntharalingam V, Preble D, Wyatt PW Journal of Vacuum Science & Technology B, 17(2), 345, 1999 |