검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
X-Ray-Induced Mask Contamination and Particulate Monitoring in X-Ray Steppers Capasso C, Pomerene A, Chu W, Leavey J, Lamberti A, Hector S, Oberschmidt J, Pol V Journal of Vacuum Science & Technology B, 14(6), 4336, 1996 |
| 2 |
Fabrication of High-Performance 512K Static-Random Access Memories in 0.25 Mu-M Complementary Metal-Oxide-Semiconductor Technology Using X-Ray-Lithography Viswanathan R, Seeger D, Bright A, Bucelot T, Pomerene A, Petrillo K, Blauner P, Agnello P, Warlaumont J, Conway J, Patel D Journal of Vacuum Science & Technology B, 11(6), 2910, 1993 |