화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 The study of carbon-coated V2O5 nanoparticles as a potential cathodic material for Li rechargeable batteries
Koltypin M, Pol V, Gedanken A, Aurbach D
Journal of the Electrochemical Society, 154(7), A605, 2007
2 X-ray lithography for <= 100 nm ground rules in complex patterns
Hector S, Pol V, Krasnoperova A, Maldonado J, Flamholz A, Heald D, Stahlhammer C, Galburt D, Amodeo R, Donohue T, Wind S, Buchigniano J, Viswanathan R, Khan M, Bollepalli S, Cerrina F
Journal of Vacuum Science & Technology B, 15(6), 2517, 1997
3 Extendibility of X-Ray-Lithography to Less-Than-or-Equal-to-130 nm Ground Rules in Complex Integrated-Circuit Patterns
Hector S, Chu W, Thompson M, Pol V, Dauksher B, Cummings K, Resnick D, Pendharkar S, Maldonado J, Mccord M, Krasnoperova A, Liebmann L, Silverman J, Guo J, Khan M, Bollepalli S, Capodieci L, Cerrina F
Journal of Vacuum Science & Technology B, 14(6), 4288, 1996
4 X-Ray-Induced Mask Contamination and Particulate Monitoring in X-Ray Steppers
Capasso C, Pomerene A, Chu W, Leavey J, Lamberti A, Hector S, Oberschmidt J, Pol V
Journal of Vacuum Science & Technology B, 14(6), 4336, 1996