검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Growth and characterization of hafnium silicate films prepared by UV/ozone oxidation Punchaipetch P, Pant G, Kim MJ, Wallace RM, Gnade BE Journal of Vacuum Science & Technology A, 22(2), 395, 2004 |
| 2 |
Low temperature UV/ozone oxidation formation of HfSiON gate dielectric Pant G, Punchaipetch P, Kim MJ, Wallace RM, Gnade BE Thin Solid Films, 460(1-2), 242, 2004 |
| 3 |
Hafnium silicate formation by ultra-violet/ozone oxidation of hafnium silicide Punchaipetch P, Pant G, Quevedo-Lopez M, Zhang H, El-Bouanani M, Kim MJ, Wallace RM, Gnade BE Thin Solid Films, 425(1-2), 68, 2003 |