화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Investigation of oxidation resistance of Ni-Ti film used as oxygen diffusion barrier layer
Liu BT, Yan XB, Zhang X, Zhou Y, Guo YN, Bian F, Zhang XY
Applied Surface Science, 255(12), 6179, 2009
2 Preparation of SiNx passivation films for PZT ferroelectric capacitors at low substrate temperatures by catalytic CVD
Minamikawa T, Yonezawa Y, Heya A, Fujimori Y, Nakamura T, Masuda A, Matsumura H
Thin Solid Films, 395(1-2), 284, 2001