검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Chemical Dry-Etching of Silicon-Nitride and Silicon Dioxide Using CF4/O-2/N-2 Gas-Mixtures Kastenmeier BE, Matsuo PJ, Beulens JJ, Oehrlein GS Journal of Vacuum Science & Technology A, 14(5), 2802, 1996 |
| 2 |
Thin-Film Interferometry of Patterned Surfaces Maynard HL, Hershkowitz N Journal of Vacuum Science & Technology B, 13(3), 848, 1995 |