화학공학소재연구정보센터
검색결과 : 11건
No. Article
1 Who controls energy efficiency policy? A case study of the energy saving trust
Owen G
Energy Policy, 25(11), 959, 1997
2 Papers from the 41st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication - Preface
Owen G
Journal of Vacuum Science & Technology B, 15(6), 2091, 1997
3 Obtaining a physical two-dimensional Cartesian reference
Takac MT, Ye J, Raugh MR, Pease RF, Berglund CN, Owen G
Journal of Vacuum Science & Technology B, 15(6), 2173, 1997
4 Economic-Assessment of Membrane Processes for Water and Waste-Water Treatment
Owen G, Bandi M, Howell JA, Churchhouse SJ
Journal of Membrane Science, 102, 77, 1995
5 Field Distortion Characterization Using Linewidth or Pitch Measurement
Ye J, Berglund CN, Pease RF, Owen G, Jaeger R, Alexander K, Seeger J
Journal of Vacuum Science & Technology B, 13(6), 2904, 1995
6 Workpiece Charging in Electron-Beam Lithography
Ingino J, Owen G, Berglund CN, Browning R, Pease RF
Journal of Vacuum Science & Technology B, 12(3), 1367, 1994
7 Quarter-Micron Lithography with a Gapped Markle-Dyson System
Owen G, Borkholder D, Knorr C, Markle DA, Pease RF
Journal of Vacuum Science & Technology B, 12(6), 3809, 1994
8 Characterization of a 193 nm Optical Lithography System for 0.18 Mu-M and Below
Grenville A, Owen G, Pease RF
Journal of Vacuum Science & Technology B, 12(6), 3814, 1994
9 Uniform-Stress Tungsten on X-Ray Mask Membranes via He-Backside Temperature Homogenization
Mondol M, Li HY, Owen G, Smith HI
Journal of Vacuum Science & Technology B, 12(6), 4024, 1994
10 Optical Projection System for Gigabit Dynamic Random-Access Memories
Jeong H, Markle DA, Owen G, Pease RF, Grenville A
Journal of Vacuum Science & Technology B, 11(6), 2675, 1993