Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 4024-4027, 1994 DOI10.1116/1.587423 Export Citation Uniform-Stress Tungsten on X-Ray Mask Membranes via He-Backside Temperature Homogenization Mondol M, Li HY, Owen G, Smith HI Keywords:ABSORBER;LITHOGRAPHY;DISTORTION;FILMS Please enable JavaScript to view the comments powered by Disqus.
