검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Interlayer mediated epitaxy of cobalt silicide on silicon (100) from low temperature chemical vapor deposition of cobalt -Formation mechanisms and associated properties Londergan AR, Nuesca G, Goldberg C, Peterson G, Kaloyeros AE, Arkles B, Sullivan JJ Journal of the Electrochemical Society, 148(1), C21, 2001 |
| 2 |
Low temperature metalorganic chemical vapor deposition of conformal silver coatings for applications in high aspect ratio structures Eisenbraun ET, Klaver A, Patel Z, Nuesca G, Kaloyeros AE Journal of Vacuum Science & Technology B, 19(2), 585, 2001 |
| 3 |
Integration of chemical vapor deposition Al interconnects in a benzocyclobutene low dielectric constant polymer matrix: A feasibility study Wickland H, Talevi R, Bian ZL, Nuesca G, Sankaran S, Kumar K, Geer RE, Kaloyeros AE, Liu J, Hummel J, Shaffer EO, Martin SJ Journal of Vacuum Science & Technology B, 18(5), 2463, 2000 |
| 4 |
The effects of processing parameters in the chemical vapor deposition of cobalt from cobalt tricarbonyl nitrosyl Ivanova AR, Nuesca G, Chen XM, Goldberg C, Kaloyeros AE, Arkles B, Sullivan JJ Journal of the Electrochemical Society, 146(6), 2139, 1999 |
| 5 |
Low temperature metal-organic chemical vapor deposition of tungsten nitride as diffusion barrier for copper metallization Kelsey JE, Goldberg C, Nuesca G, Peterson G, Kaloyeros AE, Arkles B Journal of Vacuum Science & Technology B, 17(3), 1101, 1999 |
| 6 |
Low temperature metalorganic chemical vapor deposition of tungsten nitride as diffusion barrier for copper metallization (vol B17, pg 1101, 1999) Kelsey JE, Goldberg C, Nuesca G, Peterson G, Kaloyeros AE, Arkles B Journal of Vacuum Science & Technology B, 17(5), 2193, 1999 |