| 1 |
Polyimide-based organic thin films prepared by rf magnetron sputtering
Kinbara A, Hayashi T, Wakahara K, Kikuchi N, Kusano E, Nanto H
Thin Solid Films, 433(1-2), 274, 2003 |
| 2 |
Effects of excess oxygen introduced during sputter deposition on carrier mobility in as-deposited and postannealed indium-tin-oxide films
Kikuchi N, Kusano E, Kishio E, Kinbara A, Nanto H
Journal of Vacuum Science & Technology A, 19(4), 1636, 2001 |
| 3 |
Effect of coil-dc potential on ion energy distribution measured by an energy-resolved mass spectrometer in ionized physical vapor deposition
Kusano E, Saitoh T, Kobayashi T, Fukushima K, Kikuchi N, Nanto H, Kinbara A
Journal of Vacuum Science & Technology A, 17(4), 2360, 1999 |
| 4 |
Titanium carbide film deposition by DC magnetron reactive sputtering using a solid carbon source
Kusano E, Satoh A, Kitagawa M, Nanto H, Kinbara A
Thin Solid Films, 343-344, 254, 1999 |
| 5 |
Hardness enhancement by compositionally modulated structure of Ti/TiN multilayer films
Kusano E, Kitagawa M, Nanto H, Kinbara A
Journal of Vacuum Science & Technology A, 16(3), 1272, 1998 |
| 6 |
Adhesion and hardness of compositionally gradient TiO2/Ti/TiN, ZrO2/Zr/ZrN, and TiO2/Ti/Zr/ZrN coatings
Kusano E, Kitagawa M, Kuroda Y, Nanto H, Kinbara A
Thin Solid Films, 334(1-2), 151, 1998 |
| 7 |
Zinc-Oxide Thin-Film Chemical Sensors in Conjunction with Neural-Network Pattern-Recognition for Trimethylamine and Dimethylamine Gases
Nanto H, Tsubakino S, Kawai T, Ikeda M, Kitagawa S, Habara M
Journal of Materials Science, 29(24), 6529, 1994 |
